QUANTITATIVE SURFACE ANALYSIS BY X-RAY INDUCED ELECTRON EMISSION, H. Ebel, R. Svagera and M.F. Ebel, pp. 519-533

The theoretical approach of TEY (total electron yield) for quantitative surface analysis is demonstrated for binary Au-Cu alloys and the evaluation of thin layer measurements on the example of thin aGa,,As layers on GaAs substrates. Further considerations deal with detection limits of the method. An interesting feature of TEY is the possibility to quantify buried thin layers. The detection limits are less than monolayer thicknesses. Another essential feature of TEY is the much higher electron yield of low Z elements when compared to the yield of characteristic x-ray photons.